1
Carlton Grant Willson, Matthew Earl Colburn: Step and flash imprint lithography. Board of Regents The University of Texas System, Myers Bigel Sibley & Sajovec P A, January 1, 2002: US06334960 (337 worldwide citation)

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such ...


2
Todd Bailey, Byung J Choi, Matthew Colburn, S V Sreenivasan, C Grant Willson, John Ekerdt: Template for room temperature, low pressure micro-and nano-imprint lithography. Board of Regents The University of Texas System, Kenneth C Brooks, February 24, 2004: US06696220 (270 worldwide citation)

Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activati ...


3
Carlton Grant Willson, Matthew Earl Colburn: Step and flash imprint lithography. Board of Regents The University of Texas System, Myers Bigel Sibley & Sajovec, April 13, 2004: US06719915 (125 worldwide citation)

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such ...


4
Sidlgata V Sreenivasan, Roger T Bonnecaze, Carlton Grant Willson: Method for imprint lithography using an electric field. Molecular Imprints, Kenneth C Brooks, June 21, 2005: US06908861 (123 worldwide citation)

A lithography process for creating patterns in an activating light curable liquid using electric fields followed by curing of the activating light curable liquid is described. The process involves the use of a template that is formed of non-conductive and electrically conductive portions. The templa ...


5
John William Ernest Brydon, Grant Willson: Inspiratory duration in CPAP or assisted respiration treatment. ResMed, Pillsbury Madison & Sutro, April 10, 2001: US06213119 (120 worldwide citation)

Apparatus for the supply of breathable gas cyclically at an inspiratory pressure and a lower expiratory pressure substantially in synchronism with a patient's respiration. A flow generator coupled to a gas delivery system delivers breathable gas to the patient's airway. A motor controller ...


6
Carlton Grant Willson, Sidlgata V Sreenivasan, Roger T Bonnecaze: Method for fabricating nanoscale patterns in light curable compositions using an electric field. Board of Regents The University of Texas System, Kenneth C Brooks, November 15, 2005: US06964793 (49 worldwide citation)

A high-throughput lithography process for creating high-resolution patterns in a polymerizable composition using carefully controlled electric field followed by curing of the polymerizable composition is described. The process involves the use of a template that includes the desired patterns. This t ...


7
Byung J Choi, Matthew Colburn, S V Sreenivasan, C Grant Willson, Todd Bailey, John Ekerdt: Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography. Boards of Regents The University of Texas System, Kenneth C Brooks, October 11, 2005: US06954275 (45 worldwide citation)

Described are high precision gap and orientation measurement methods between a template and a substrate used in imprint lithography processes. Gap and orientation measurement methods presented here include uses of broad-band light based measuring techniques.


8
Byung J Choi, Ronald D Voisin, Sidlgata V Sreenivasan, Michael P C Watts, C Grant Willson, Norman E Schumaker, Mario J Meissl: Method for modulating shapes of substrates. Molecular Imprints, Kenneth C Brooks, December 27, 2005: US06980282 (35 worldwide citation)

The present invention is directed to a method for modulating shapes of a substrate, having first and second opposed surfaces. This is achieved by creating a pressure differential between differing regions of the first opposed surface to attenuate structural distortions in the second opposed surface ...


9
C Grant Willson, Uzodinma Okoroanyanwu, David Medieros: Photoresist compositions comprising norbornene derivative polymers with acid labile groups. Board of Regents The University of Texas System, Townsend & Townsend & Crew, August 15, 2000: US06103445 (25 worldwide citation)

Provided herein are photoresist compositions for use particularly in 193 nm lithography. These compositions generally comprise a polymer of norbornene and a photo acid generator. The disclosed compositions provide transparency at wavelengths of approximately 190-200 nm, combined with high etch resis ...


10
David P Mancini, Douglas J Resnick, Carlton Grant Willson: Lithographic template and method of formation and use. Freescale Semiconductor, University of Texas System, May 10, 2005: US06890688 (24 worldwide citation)

This invention relates to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template (10, 110, 210) is formed having a substrate (12, 112, 212) and a charge dissipation layer (20, 120, 220), and a ...