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Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks, Franciscus Johannes Joseph Janssen, Gert Jan Gerardus Johannes Thomas Brands, Koen Steffens: Lithographic apparatus having parts with a coated film adhered thereto. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, July 14, 2009: US07561250 (4 worldwide citation)

A lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a subst ...


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Koen Steffens, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Daniël Jozef Maria Direcks, Gert Jan Gerardus Johannes Thomas Brands: Lithographic apparatus and device manufacturing method. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, July 10, 2012: US08218126 (2 worldwide citation)

A liquid handling system is disclosed in which an extractor to contain liquid in a space between the projection system of a lithographic apparatus and a substrate has, in plan, a shape with a single corner. The extractor is provided in a rotatable part of a liquid handling system. The rotatable part ...


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Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks, Franciscus Johannes Joseph Janssen, Gert Jan Gerardus Johannes Thomas Brands, Koen Steffens: Lithographic apparatus having parts with a coated film adhered thereto. Asml Netherland, Pillsbury Winthrop Shaw Pittman, December 25, 2008: US20080316441-A1

A lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a subst ...