1
Yim Bun Patrick Kwan, Gerrit Maarten Bonnema, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Gerjan Peter Veldhuis: Positioning device having two object holders. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, February 5, 2008: USRE040043

A positioning device has first and second object holders that are guided over a guiding surface extending parallel to an X-direction and parallel to a Y-direction perpendicular to the X-direction and which are displaceable over the guiding surface from a first position into a second position by mean ...


2
Yim Bun Patrick Kwan, Serge Felix Chretien Lucien, Gerjan Peter Veldhuis: Positioning system for use in lithographic apparatus. Asml Netherlands, Pillsbury Winthrop, February 26, 2004: US20040036035-A1

A positioning system, such as may be used to position a moveable object table in three degrees of freedom. More particularly, the invention relates to the use of the positioning system in a lithographic projection apparatus including an illumination system for supplying a projection beam of radiatio ...