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Eva Mondt, Noud Jan Gilissen, Hernes Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen: Substrate table, lithographic apparatus and device manufacturing method. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, September 25, 2012: US08274641 (2 worldwide citation)

A table is disclosed in which measures are taken to seal between the table and an edge of an object, in use, supported on the table. In particular, a capillary passage is formed between the object on the table and the table itself. A meniscus pinning feature and/or the presence of an overpressure at ...


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Suzan Leonie Auer Jongepier, Jeroen Johannes Sophia Maria Mertens, Frank Bernhard Sperling, Teunis Cornelis Van Den Dool, Eva Mondt, Alexander Nikolov Zdravkov, Paulus Martinus Hubertus Vissers: Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, January 21, 2014: US08634052 (2 worldwide citation)

A lithographic apparatus that includes a substrate table holding a substrate, a projection system configured to project a patterned beam of radiation onto the substrate, a liquid supply system configured to provide a liquid to a space between the projection system and the substrate table, and a ring ...


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Paulus Cornelis Duineveld, Eva Mondt, Harko Jan Taekema, Willem Sjouke Wijma, Marc Alexander Pastoors, Wilhelmus Hendrikus Maria Bruggink: Device comprising a source for emitting ultraviolet light. KONINKLIJKE PHILIPS, May 26, 2015: US09040938 (1 worldwide citation)

A device (1) comprises a source (20) for emitting ultraviolet light, an inlet (30) for letting in fluid to the device (1), an outlet (40) for letting out fluid from the device (1), and means (51, 52) for performing a straightening action of a flow of fluid through the device (1). The flow straighten ...


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Hernes Jacobs, Eva Mondt, Alexander Nikolov Zdravkov: Lithographic apparatus and method. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, April 9, 2013: US08416383

A lithographic apparatus is disclosed that includes a seal provided in a substrate table, the seal being actuatable from an open configuration to a closed configuration, the closed configuration being such that when a substrate is located on the substrate table, the seal closes a gap between the sub ...


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Eva Mondt, Paulus Cornelis Duineveld: Device comprising means for guiding fluid from an inlet to an outlet. Koninklijke Philips, December 24, 2013: US08614424

A device including a housing having an interior space for containing fluid, an inlet for letting in fluid to the housing, an outlet for letting out fluid from the housing, an element which is arranged inside the housing, and fluid guiding components which are arranged in the housing as well and whic ...


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Johannes Tseard Van Der Kool, Fokke Roelof Voorhorst, Bastian Cornelis Kleine Doepke, Maiza Georgien Salomons, Richard Henrik Jousma, Eva Mondt: Device for purifying a fluid. KONINKLIJKE PHILIPS, January 26, 2016: US09242194

A device (1) comprises filtering means (30) for removing particles from a fluid, which have a particle collecting face (31) for collecting particles during use of the device (1), and a chamber (10) in which a fluid is present and in which the filtering means (30) are arranged. An inlet (11) of the c ...


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Hernes Jacobs, Erik Roelof Loopstra, Michel Riepen, Eva Mondt: Lithographic apparatus and method of removing liquid. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, March 18, 2014: US08675172

A method of removing liquid from a substrate supported on a substrate table and from a gap between the substrate and the substrate table includes: providing a liquid removal device with at least one outlet connected to an under pressure source, the outlet forming an elongated extractor of a predeter ...


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Hernes Jacobs, Erik Roelof Loopstra, Michel Riepen, Eva Mondt: Lithographic apparatus and method of removing liquid. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, April 6, 2010: US07692765

A method of removing liquid from a substrate supported on a substrate table and from a gap between the substrate and the substrate table includes: providing a liquid removal device with at least one outlet connected to an under pressure source, the outlet forming an elongated extractor of a predeter ...