1
Ravi Laxman
Ravi Kumar Laxman, David Allen Roberts, Arthur Kenneth Hochberg, Herman Gene Hockenhull, Felicia Diane Kaminsky: Silicon nitride from bis(tertiarybutylamino)silane. Air Products and Chemicals, Geoffrey L Chase, February 23, 1999: US05874368 (89 worldwide citation)

A process for the low pressure chemical vapor deposition of silicon nitride from ammonia and a silane of the formula: (t-C.sub.4 H.sub.9 NH).sub.2 SiH.sub.2 provides improved properties of the resulting film for use in the semiconductor industry.


2
Ravi Laxman
Ravi Kumar Laxman, David Allen Roberts, Arthur Kenneth Hochberg: Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane. Air Products and Chemicals, Geoffrey L Chase, November 2, 1999: US05976991 (46 worldwide citation)

A process for the chemical vapor deposition of silicon dioxide and silicon oxynitride from reactant gases O.sub.2, O.sub.3, N.sub.2 O, NO, NO.sub.2, NH.sub.3 and a silane of the formula: (t-C.sub.4 H.sub.9 NH).sub.2 SiH.sub.2. A process whereby a stack of silicon containing dielectrics ranging from ...


3
Brian Goodall
Brian L Goodall, Saikumar Jayaraman, Robert A Shick, Larry F Rhodes, Robert David Allen, Richard Anthony DiPietro, Thomas Wallow: Photoresist compositions comprising polycyclic polymers with acid labile pendant groups. Sumitomo Bakelite, International Business Machines, Thoburn T Dunlap, Hudak Shunk & Farine Co A, April 20, 2004: US06723486 (24 worldwide citation)

The present invention relates to a radiation sensitive photoresist composition comprising a photoacid initiator and a polycyclic polymer comprising repeating units that contain pendant acid labile groups. Upon exposure to an imaging radiation source the photoacid initiator generates an acid which cl ...


4
Peter A. Bouchard
Jeffrey Phillips, David Allen, Brett Serkez, Peter Bouchard: Method and apparatus for managing information related to storage activities of data storage systems. EMC Corporation, Wolf Greenfield & Sacks PC, May 30, 2006: US07054892 (12 worldwide citation)

Methods and apparatus for managing information related to backup storage activities of data storage systems. In a computer system having one or more independent backup data storage systems coupled to each other and each serving one or more clients, a user may obtain information related to backup act ...


5
Brian Goodall
Saikumar Jayaraman, Brian Leslie Goodall, Larry Funderburk Rhodes, Robert Adam Shick, Richard Vicari, Robert David Allen, Juliann Opitz, Ratnam Sooriyakumaran, Thomas Wallow: Polycyclic resist compositions with increased etch resistance. The B F Goodrich Company, International Business Machines Corporation, Thoburn T Dunlap, November 14, 2000: US06147177 (6 worldwide citation)

Polycyclic polymers containing pendant aromatic moieties are disclosed. The polymers exhibit light transparency properties to deep UV wave lengths making them useful for high resolution photolithographic applications. These polymers are particularly useful in chemically amplified positive and negati ...


6
Brian Goodall
Saikumar Jayaraman, Brian Leslie Goodall, Larry Funderburk Rhodes, Robert Adam Shick, Richard Vicari, Robert David Allen, Juliann Opitz, Ratnam Sooriyakumaran, Thomas Wallow: Polycyclic resist compositions with increased etch resistance. The B F Goodrich Company, International Business Machines, Thoburn T Dunlap, Hudak & Shunk Co LPA, September 17, 2002: US06451499 (6 worldwide citation)

Polycyclic polymers containing pendant aromatic moieties are disclosed. The polymers exhibit light transparency properties to deep UV wave lengths making them useful for high resolution photolithographic applications. These polymers are particularly useful in chemically amplified positive and negati ...


7
Peter A. Bouchard
Jeffrey Phillips, David Allen, Brett Serkez, Peter Bouchard: Method and apparatus for managing information related to storage activities of data storage systems. EMC Corporation, Wolf Greenfield & Sacks P C, March 18, 2008: US07346636 (4 worldwide citation)

Methods and apparatus for managing information related to backup storage activities of data storage systems. In a computer system having one or more independent backup data storage systems coupled to each other and each serving one or more clients, a user may obtain information related to backup act ...


8
Brian Goodall
Saikumar Jayaraman, Brian L Goodall, Richard Vicari, John Henry Lipian, Robert David Allen, Juliann Opitz, Thomas I Wallow: Polycyclic polymers containing pendant cyclic anhydride groups. Sumitomo Bakelite, International Business Machines, Thoburn T Dunlap, Hudak Shunk & Farine Co, February 25, 2003: US06525153 (4 worldwide citation)

Polymers comprising polycyclic repeating units containing pendant anhydride moieties are disclosed. The polymer can be polymerized from polycycloolefins containing pendant anhydride moieties in the presence of a nickel containing single component catalyst. In optional embodiments the polycycloolefin ...


9
Peter A. Bouchard
Jeffrey Phillips, David Allen, Brett Serkez, Peter Bouchard: Method and apparatus for managing information related to storage activities of data storage systems. EMC Corporation, Dergosits & Noah, Todd A Noah, November 27, 2012: US08321378

Methods and apparatus for managing information related to backup storage activities of data storage systems. In a computer system having one or more independent backup data storage systems coupled to each other and each serving one or more clients, a user may obtain information related to backup act ...


10
Brian Goodall
Brian L Goodall, Saikumar Jayaraman, Robert A Shick, Larry F Rhodes, Robert David Allen, Richard Anthony DiPietro, Thomas Wallow: Photoresist compositions comprising polycyclic polymers with acid labile pendant groups. The BF Goodrich Company, Law Department, September 12, 2002: US20020128408-A1

The present invention relates to a radiation sensitive photoresist composition comprising a photoacid initiator and a polycyclic polymer comprising repeating units that contain pendant acid labile groups. Upon exposure to an imaging radiation source the photoacid initiator generates an acid which cl ...