1
Daniel H Grantham, Mario S Latina: Capacitive pressure sensor with third encircling plate. United Technologies Corporation, August 21, 1990: US04951174 (41 worldwide citation)

A pressure sensor (210) utilizing capacitance variations to sense pressure variations of the silicon-glass-silicon type (FIG. 3) including a conductive silicon substrate (212), a conductive silicon diaphragm (211) and a glass dielectric layer (213) therebetween forming a spacing wall (216) between t ...


2
Walter J Wiegand, James L Swindal, Richard E Swarts, Robert H Bullis, Mario T Lopiccolo, Daniel H Grantham, Arthur G Foyt: Capacitive accelerometer with separable damping and sensitivity. United Technologies, Eric W Petraske, May 29, 1990: US04930042 (28 worldwide citation)

A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significa ...


3
Daniel H Grantham, James L Swindal: Three plate silicon-glass-silicon capacitive pressure transducer. United Technologies Corporation, Dominic J Chiantera, August 21, 1984: US04467394 (28 worldwide citation)

A three plate silicon-glass-silicon capacitive pressure transducer includes a conductive silicon diaphragm and substrate relatively spaced by a dielectric body having disposed therein a central electrode positioned between the diaphragm and substrate to form a pressure responsive capacitance with th ...


4
James L Swindal, Daniel H Grantham: Silicon-glass-silicon capacitive pressure transducer. United Technologies Corporation, M P Williams, September 20, 1983: US04405970 (28 worldwide citation)

A silicon capacitive pressure transducer 34 comprising two wafers of silicon 14, 32 separated by borosilicate glass 18, 21, one of the wafers 14 having a borosilicate glass pedestal 26 thereon which is metallized 30 to provide one plate of a capacitor, the other plate of which is the surface of one ...


5
Daniel H Grantham, James L Swindal: Electrostatic bonded, silicon capacitive pressure transducer. United Technologies Corporation, M P Williams, November 15, 1983: US04415948 (28 worldwide citation)

A plurality of silicon pressure transducers 10 are formed by processing two conductive silicon wafers 11, 14, one of the wafers including a layer of borosilicate glass 32, a thin portion of which 17 is on the surface 12 of one of the plates of a capacitor formed by field-assisted bonding together of ...


6
Daniel H Grantham: Hydrogen gas generation utilizing a bromide electrolyte and radiant energy. United Technologies Corporation, Harry J Gwinnell, May 20, 1980: US04203814 (20 worldwide citation)

Radiant energy to at least partially power an electrolytic cell is used in the generation of hydrogen, utilizing a bromide, preferably hydrogen bromide, as the essential electrolyte component in the electrolytic cell to solve overvoltage and corrosion problems associated with the use of conventional ...


7
Thomas W Grudkowski, Anthony J DeMaria, Alexander J Shuskus, Daniel H Grantham: Planar piezoelectric deflector with arrays of alternate piezoelectric effect. United Technologies Corporation, M P Williams, January 1, 1985: US04491761 (19 worldwide citation)

Low cost, easily reproducible piezoelectric deflector (8) operable with low voltages is achieved by providing an interdigital electrode configuration (12, 13) on a surface of piezoelectric material (10) having alternate sites (15, 16) with different piezoelectric response. A preferred embodiment pol ...


8
Daniel H Grantham: Low parasitic capacitance pressure transducer and etch stop method. United Technologies Corporation, M P Williams, April 23, 1985: US04513348 (18 worldwide citation)

A capacitive pressure transducer has a pedestal 25 formed in a silicon layer 14 surrounded by a moat 26 extending through the silicon layer, with borosilicate glass 17, 22 at the edges of the silicon layer forming the walls of the pressure chamber, with a wafer 28 of silicon bonded thereto. The pede ...


9
Daniel H Grantham: Differential capacitive pressure sensor with over-pressure protection. United Technologies Corporation, November 7, 1989: US04879627 (17 worldwide citation)

A pressure sensor (10) having over-protection for use in environments which subject the sensor to large pressure overloads, such as may occur when such sensor is exposed to jet and automobile engine backfires, explosive gas furnace ignitions and similar high pressure events. Essentially two capaciti ...


10
Daniel H Grantham, James L Swindal: Method for pattern masking objects and the products thereof. United Technologies Corporation, Stephen A Schneeberger, August 30, 1983: US04401367 (15 worldwide citation)

A method is provided for pattern masking objects preparatory to subsequent working of the objects. The invention also includes those objects prepared in accordance with the method. The method is especially suited to the pattern-masking of relatively large and/or complexly shaped optical elements pre ...