1
Jeffrey L Briesacher, Charles H Applegarth, D Arcy H Lorimer: Method and apparatus for removing residual hydrogen from a purified gas. SAES Pure Gas, Hickman & Beyer, August 24, 1993: US05238469 (63 worldwide citation)

The invention relates generally to a gas purification system for the purification of noble gasses and nitrogen. An improved method of purification generally includes the following steps: (a) heating an impure gas; (b) contacting the impure gas with an impurity sorbing material to produce a purified ...


2
D Arcy H Lorimer: Low particulate slit valve system and method for controlling same. Applied Materials, Jacques M Dulin, Harold T Fujii, Claude Hamrick, November 15, 1994: US05363872 (41 worldwide citation)

Low particulate slit valve system and method for controlling the closure pressure applied to a slit valve. An apparatus in accordance with the present invention includes a barrier having a slit valve aperture, a valve seat surrounding the aperture, a closure movable towards and away from the valve s ...


3
D Arcy H Lorimer, Craig A Bercaw: Method of forming a corrosion-resistant protective coating on aluminum substrate. Applied Materials, John P Taylor, December 3, 1991: US05069938 (15 worldwide citation)

A corrosion-resistant protective coating on an aluminum substrate capable of withstanding corrosion attack by process halogen gases and plasmas is disclosed. The protective coating is formed by contacting an aluminum oxide layer on an aluminum substrate with one or more fluorine-containing gases at ...


4
Gordon P Krueger, D Arcy H Lorimer, Sergio Carella, Andrea Conte: Getter pump module and system. SAES Getter S p A, Hickman Stephens & Coleman, October 26, 1999: US05972183 (14 worldwide citation)

A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the he ...


5
D Arcy H Lorimer, Gordon P Krueger: In situ getter pump system and method. SAES Pure Gas, Hickman Beyer & Weaver, November 11, 1997: US05685963 (14 worldwide citation)

A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps ...


6
D Arcy H Lorimer: Method and apparatus for predicting end-of-life of a consumable in a fluid purification system. SAES Pure Gas, Hickman & Beyer, August 2, 1994: US05334237 (14 worldwide citation)

A method for predicting end-of-life of a system consumable in a fluid purification system characterized by the steps of (a) coupling a model consumable to the fluid purification system which has comparable characteristics but substantially less time capacity than the system consumable; (b) diverting ...


7
D Arcy H Lorimer, Charles H Applegarth: Semiconductor manufacturing system with getter safety device. SAES Pure Gas, Hickman Stephens & Coleman, May 30, 2000: US06068685 (13 worldwide citation)

A semiconductor manufacturing system includes a getter-based gas purifier coupled in flow communication with a gas distribution network for a semiconductor fabrication facility. The gas distribution network supplies purified gas to at least one wafer processing chamber in the semiconductor fabricati ...


8
D Arcy H Lorimer: Method and apparatus for purifying hydrogen gas. SAES Pure Gas, Hickman & Martine, April 20, 1999: US05895519 (11 worldwide citation)

A method and apparatus for providing substantially pure hydrogen gas from a mixture of hydrogen and gaseous contaminants includes passing a gaseous mixture containing hydrogen gas and gaseous impurities through a purifier to form substantially pure hydrogen gas which is stored in a porous storage ma ...


9
D Arcy H Lorimer: Combination cryopump/getter pump and method for regenerating same. SAES Pure Gas, Hickman & Martine, January 5, 1999: US05855118 (10 worldwide citation)

A combination cryopump/getter pump including a cryopump section having a cryopump inlet, a getter pump section having a getter pump inlet, and a mechanism for coupling the cryopump section and the getter pump section to a single port of a process chamber to be evacuated. Preferably, a cylindrical cr ...


10
D arcy H Lorimer, Gordon P Krueger: In Situ getter pump system and method. SAES Pure Gas, Hickman & Martine, November 30, 1999: US05993165 (8 worldwide citation)

A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps ...



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