1
Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, February 12, 2002: US06345502 (122 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


2
Charles Grosjean, Yu Chong Tai: Planar micropump. California Institute of Technology, Fish & Richardson P C, February 18, 2003: US06520753 (49 worldwide citation)

A micropump including a chamber plate with connected pumping chambers for accepting small volumes of a fluid and a pumping structure. The pumping structure includes a flexible membrane, portions of which may be inflated into associated pumping chambers to pump the fluid out of the chamber or seal th ...


3
Charles Grosjean: Ground strap for suppressing stiction during MEMS fabrication. SiTime, Patterson & Sheridan, June 9, 2009: US07544531 (45 worldwide citation)

To suppress stiction of a MEMS resonator during fabrication, conductive structures of the MEMS resonator are electrically coupled via a ground strap during the step of forming isolation trenches around their contact structures. After the isolation trenches have been formed, the ground strap is trans ...


4
Yu Chong Tai, Xing Yang, Charles Grosjean: MEMS valve. California Institute of Technology, Fish & Richardson P C, September 2, 2003: US06612535 (34 worldwide citation)

A valve where the valve membrane is made from silicone rubber. Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.


5
Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, March 2, 2004: US06699394 (20 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


6
Yu Chong Tai, Ellis Meng, Xuan Qi Wang, Charles Grosjean: Check-valved silicon diaphragm pump and method of fabricating the same. California Institute of Technology, Daniel L Dawes Esq, Myers Dawes & Andras, January 1, 2002: US06334761 (18 worldwide citation)

A silicone rubber diaphragm pump utilizing a pair of MEMS Parylene check valves and a miniature solenoid plunger and actuator is comprised of a spacer sandwiched by a silicone rubber diaphragm on one side and a check valve support on the other. The check valves in the check valve support form the in ...


7
Paul Merritt Hagelin, Charles Grosjean: Method for fabricating a microelectromechanical system (MEMS) resonator. SiTime Corporation, Neil A Steinberg, August 7, 2012: US08234774 (14 worldwide citation)

One embodiment of the present invention sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with oxide. By growing oxide within the slots, the amoun ...


8
Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, March 25, 2003: US06536213 (5 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


9
Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, December 31, 2002: US06499297 (4 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


10
Paul Merritt Hagelin, Charles Grosjean: Method of manufacturing a microelectromechanical system (MEMS) resonator. SiTime Corporation, Neil A Steinberg, March 11, 2014: US08667665

One embodiment of the present inventions sets forth a method for decreasing a temperature coefficient of frequency (TCF) of a MEMS resonator. The method comprises lithographically defining slots in the MEMS resonator beams and filling the slots with a compensating material (for example, an oxide) wh ...