1
Carlton Grant Willson, Matthew Earl Colburn: Step and flash imprint lithography. Board of Regents The University of Texas System, Myers Bigel Sibley & Sajovec P A, January 1, 2002: US06334960 (337 worldwide citation)

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such ...


2
Carlton Grant Willson, Matthew Earl Colburn: Step and flash imprint lithography. Board of Regents The University of Texas System, Myers Bigel Sibley & Sajovec, April 13, 2004: US06719915 (125 worldwide citation)

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such ...


3
Sidlgata V Sreenivasan, Roger T Bonnecaze, Carlton Grant Willson: Method for imprint lithography using an electric field. Molecular Imprints, Kenneth C Brooks, June 21, 2005: US06908861 (123 worldwide citation)

A lithography process for creating patterns in an activating light curable liquid using electric fields followed by curing of the activating light curable liquid is described. The process involves the use of a template that is formed of non-conductive and electrically conductive portions. The templa ...


4
Carlton Grant Willson, Sidlgata V Sreenivasan, Roger T Bonnecaze: Method for fabricating nanoscale patterns in light curable compositions using an electric field. Board of Regents The University of Texas System, Kenneth C Brooks, November 15, 2005: US06964793 (49 worldwide citation)

A high-throughput lithography process for creating high-resolution patterns in a polymerizable composition using carefully controlled electric field followed by curing of the polymerizable composition is described. The process involves the use of a template that includes the desired patterns. This t ...


5
David P Mancini, Douglas J Resnick, Carlton Grant Willson: Lithographic template and method of formation and use. Freescale Semiconductor, University of Texas System, May 10, 2005: US06890688 (24 worldwide citation)

This invention relates to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template (10, 110, 210) is formed having a substrate (12, 112, 212) and a charge dissipation layer (20, 120, 220), and a ...


6
Byung Jin Choi, Sidlgata V Sreenivasan, Carlton Grant Willson, Mattherw E Colburn, Todd C Bailey, John G Ekerdt: Method of automatic fluid dispensing for imprint lithography processes. Board of Regents The University of Texas System, Cameron A King, December 29, 2015: US09223202 (2 worldwide citation)

Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relati ...


7
Todd C Bailey, Byung Jin Choi, Matthew E Colburn, Sidlgata V Sreenivasan, Carlton Grant Willson, John G Ekerdt: Device for holding a template for use in imprint lithography. Board of Regents The University of Texas System, Cameron A King, October 11, 2011: US08033814 (2 worldwide citation)

An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and ...


8
Carlton Grant Willson, Nicholas A Stacey: Compositions for dark-field polymerization and method of using the same for imprint lithography processes. Board of Regents The University of Texas System, Heather L Flanagan, Fish & Richardson P C, March 15, 2011: US07906060 (1 worldwide citation)

The present invention provides a composition and a method of using the same to form a pattern on a substrate using imprint lithography employing dark-field polymerization. To that end, the composition includes a bis vinyl ether component, and an initiator component that produces an acid in response ...


9
David P Mancini, Douglas J Resnick, Carlton Grant Willson: Lithographic template and method of formation and use. Motorola, Corporate Law Department 56 238, June 19, 2003: US20030113638-A1 (1 worldwide citation)

This invention relates to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template (10, 110, 210) is formed having a substrate (12, 112, 212) and a charge dissipation layer (20, 120, 220), and a ...


10
Carlton Grant Willson, Tsuyoshi Ogawa, Michael W Lin, Daniel J Hellebusch, B Michael Jacobsson, William K Bell: Fluorinated silazane release agents in nanoimprint lithography. Board of Regents The University of Texas System, Heather L Flanagan, Fish & Richardson P C, January 6, 2015: US08926888

An imprint lithography release agent having general formula (1): where R1 represents H or CH3, n is an integer from 1 to 5, and m is an integer from 1 to 40. Fluorinated silazanes of general formula (1) can be used to form a release layer on an imprint lithography template, added to an imprint litho ...