1
Binnard Michael: Maintaining immersion fluid under a lithographic projection lens. Nikon Corporation, Binnard Michael, ROEDER Steven G, October 21, 2004: WO/2004/090577 (589 worldwide citation)

An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece ...


2
Binnard Michael B, Hazelton Andrew J, Watson Douglas C, Arai Yoichi: Fine stage z support apparatus. Nikon Corporation, Binnard Michael B, Hazelton Andrew J, Watson Douglas C, Arai Yoichi, GARRETT Arthur S, May 18, 2006: WO/2006/052855 (2 worldwide citation)

An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.


3
Totsu Masahiro, Binnard Michael B, Coakley Scott: Three degree of movement mover and method for controlling the same. Nikon Corporation, Totsu Masahiro, Binnard Michael B, Coakley Scott, ROEDER Steven G, October 30, 2008: WO/2008/130560 (2 worldwide citation)

A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned ne ...


4
Arai Yoichi, Ueda Toshio, Hazelton Andrew J, Binnard Michael, Novak W Thomas, Watson Douglas C, Lok Kirk, Ma Wen Hou, Yang Pai Hsueh, Teng Ting Chien, Yuan Bausan: Stage device having measuring system, initializing, vibration compensating, low-propagating and lightweight precision stage. Nikon, June 22, 2006: JP2006-165523 (1 worldwide citation)

PROBLEM TO BE SOLVED: To prevent the transmission of vibration and disturbance from the earth surface or surroundings to rough motion stage and precision state and accurately position a work piece.SOLUTION: The stage device 220 is one that moves the work piece 200 around a first axis and along the f ...


5

6

7

8

9

10