1
Ryoki Tobe, Masao Sasaki, Atsushi Sekiguchi, Ken ichi Takagi: Plasma enhanced CVD apparatus and process, and dry etching apparatus and process. Anelva Corporation, Burns Doane Swecker & Mathis, April 6, 1999: US05891349 (153 worldwide citation)

A plasma enhanced CVD apparatus includes a processing chamber, a pumping system for evacuating the processing chamber, a gas inlet system for introducing a source gas, and a plasma generating electrode provided in the processing chamber for depositing a film on a substrate in the processing chamber ...


2
Ryoki Tobe, Atsushi Sekiguchi, Masao Sasaki: Plasma enhanced CVD apparatus, plasma enhanced processing apparatus and plasma enhanced CVD method. Anelva Corporation, Burns Doane Swecker & Mathis, January 5, 1999: US05855685 (76 worldwide citation)

By forming at least one annular groove in each of electrical insulation members provided between a plasma generating electrode and a processing chamber, the insulation performance of the electrical insulation members are prevented from degradation during deposition of conductive films onto a substra ...


3
Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Atsushi Sekiguchi, Hideyuki Iriyama: Hologram recording sheet, holographic optical element using said sheet, and its production process. Dai Nippon Printing, Sughrue Mion Zinn Macpeak & Seas PLLC, October 3, 2000: US06127066 (43 worldwide citation)

The hologram recording sheet according to the invention is made up of a base film and hologram sensitive materials sensitive to different wavelength regions formed therein in a desired pattern, or a film and at least two hologram recording sensitive materials sensitive to different wavelength region ...


4
Kazuhiro Suga, Atsushi Sekiguchi, Kenji Ueda, Hiroyuki Nishimura: Hologram and method of and apparatus for producing the same. Dai Nippon Printing, Dellett and Walters, September 26, 1995: US05453338 (36 worldwide citation)

A duplicating photosensitive material film is placed into close contact with a thin flexible ND glass or an ND glass coated with a cushioning layer through an optical contacting liquid containing a surface active agent. A spacer is interposed between a hologram original plate and the duplication pho ...


5
Ryoki Tobe, Yasuaki Tanaka, Atsushi Sekiguchi, Hitoshi Jimba, So Won Kim: Method of depositing titanium nitride thin film and CVD deposition apparatus. Anelva Corporation, Burns Doane Swecker & Mathis, June 27, 2000: US06080446 (34 worldwide citation)

A method for fabricating a titanium nitride thin film in a reaction vessel on a surface of a substrate heated to a prescribed temperature, includes the steps of mixing tetrakis(dialkylamino)titanium (TDAAT) and a first carrier gas to create a first mixed gas; feeding the first mixed gas into the rea ...


6
Atsushi Sekiguchi, Hideo Mito: Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same. Anelva Corporation, Pollock VandeSande & Priddy, May 12, 1987: US04664747 (30 worldwide citation)

In a surface processing apparatus, the LTE (Local Thermal Equilibrium) plasma is produced, instead of the glow discharge, in the discharge chamber. Then the LTE plasma is conducted into the reaction chamber. The surface of the substrate positioned in the reaction chamber is exposed to at least one o ...


7
Ryoki Tobe, Masao Sasaki, Atsushi Sekiguchi, Ken ichi Takagi: Method of depositing titanium-containing conductive thin film. Anelva Corporation, Burns Doane Swecker & Mathis, February 24, 1998: US05721021 (28 worldwide citation)

A method of depositing a titanium-containing conductive thin film, which is capable of depositing a high-quality thin film having a low chlorine content by grounding, through a capacitor, a terminal of a plasma generating electrode disposed in a processing chamber. In the method, one of the introduc ...


8
Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Atsushi Sekiguchi, Hideyuki Iriyama: Hologram recording sheet, holographic optical element using said sheet, and its production process. Dai Nippon Printing, Sughrue Mion PLLC, November 7, 2006: US07132200 (26 worldwide citation)

The hologram recording sheet according to the invention is made up of a base film and hologram sensitive materials sensitive to different wavelength regions formed therein in a desired pattern, or a film and at least two hologram recording sensitive materials sensitive to different wavelength region ...


9
Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Atsushi Sekiguchi, Hideyuki Iriyama: Hologram recording sheet holographic optical element using said sheet and its production process. Dai Nippon Printing, Sughrue Mion Zinn Macpeak & Seas PLLC, January 22, 2002: US06340540 (24 worldwide citation)

The hologram recording sheet according to the invention is made up of a base film and hologram sensitive materials sensitive to different wavelength regions formed therein in a desired pattern, or a film and at least two hologram recording sensitive materials sensitive to different wavelength region ...


10
Kenji Ueda, Tsuyoshi Hotta, Yukio Taniguchi, Atsushi Sekiguchi, Hideyuki Iriyama: Hologram recording sheet, holographic optical element using said sheet, and its production process. Dai Nippon Printing, Sughrue Mion PLLC, August 25, 2009: US07579119 (22 worldwide citation)

The hologram recording sheet according to the invention is made up of a base film and hologram sensitive materials sensitive to different wavelength regions formed therein in a desired pattern, or a film and at least two hologram recording sensitive materials sensitive to different wavelength region ...