1
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. Edwards, January 27, 2009: US07481867 (8 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


2
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, April 24, 2012: US08164734 (5 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...


3
Ravi Jain, Julian Richard Dean, Robert Bruce Grant, Naum Perelman, Paul Alan Stockman, Neil Condon, Andrew John Harpham, William R Gerristead Jr: Treatment of effluent gases. The BOC Group, David A Hey, May 6, 2008: US07368000 (5 worldwide citation)

A method is described for recovering a noble gas, such as xenon or krypton, from a first gas mixture comprising a plurality of components, one of which is the noble gas and the others are typically helium and/or nitrogen, argon, and relatively light fluorocarbons. The gas mixture is first conveyed t ...


4
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, September 9, 2014: US08830440 (3 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


5
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML NETHERLANDS, Pillsbury Winthrop Shaw Pittman, January 2, 2018: US09857699 (1 worldwide citation)

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...


6
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, January 1, 2019: US10168624

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


7
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. ASML NETHERLANDS, Pillsbury Winthrop Shaw Pittman, November 29, 2016: US09507270

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...


8
Andrew John Harpham, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. Ira Lee Zebrak, The BOC Group, December 22, 2005: US20050282405-A1

A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phase ...


9
Ravi Jain, Julian Richard Dean, Robert Bruce Grant, Naum Perelman, Paul Alan Stockman, Neil Condon, Andrew John Harpham: Treatment of effluent gases. The Boc Group, June 22, 2006: US20060130649-A1

A method is described for recovering a noble gas, such as xenon or krypton, from a first gas mixture comprising a plurality of components, one of which is the noble gas and the others are typically helium and/or nitrogen, argon, and relatively light fluorocarbons. The gas mixture is first conveyed t ...


10
Andrew John HARPHAM, Paul John Shechter, Paul Alan Stockman: Vacuum system for immersion photolithography. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, August 13, 2009: US20090201471-A1

A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phas ...