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Katherina Babich
Katherina Babich, Alessandro Callegari, Stephen Alan Cohen, Alfred Grill, Christopher Vincent Jahnes, Vishnubhai Vitthalbhai Patel, Sampath Purushothaman, Katherine Lynn Saenger: Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation. Robert M Trepp, Intellectual Property Law Department, March 21, 2002: US20020033535-A1

A method for providing regions of substantially lower fluorine content in a fluorine containing dielectric is described incorporating exposing a region to ultraviolet radiation and annealing at an elevated temperature to remove partially disrupted fluorine from the region. The invention overcomes th ...


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Tanitsu Osamu, Shibuya Masato: Illumination optical device, exposure apparatus having the device, and method of manufacturing micro-device using the exposure apparatus. Nikon, March 21, 2002: TW480585 (22 worldwide citation)

The present invention relates to an illumination optical device for adjusting the size of an illuminated region on an irradiated face and illumination (NA) to a desired level while a loss in light quantity is reduced adequately. An illuminated face is irradiated by an illumination optical device. Th ...


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Guo Tian Ying, Guo Tzung Jie, Lin Jia Wen: Fast motion-compensated video frame interpolator. Industrial Technology Research Institute, March 21, 2002: TW480885 (18 worldwide citation)

A block-based motion-compensated frame interpolation method and apparatus using a block-based video coder operating in low bit rates. Smooth movement of objects between video frames can be obtained without the complexity of pixelwise motion estimation that is present in standard MCI. An additional m ...


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Jang You Yang, Shiu Jr Rung, Li Jeng Jung: Method for enhancing emission efficiency of carbon nanotube emission source field. Industrial Technology Research Institute, March 21, 2002: TW480537 (11 worldwide citation)

A method for enhancing the current density of field emission of a carbon nanotube comprises the following steps: using a screen printing to print a carbon nanotube slurry on an anode conductive region of an anode substrate to form a plurality of pixel blocks of a carbon nanotube layer; applying a lo ...


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Lee Young Suk, Hwang Chul Ju: High density plasma chemical vapor deposition apparatus and gap filling method using the same. Jusung Engineering, March 21, 2002: TW480569 (9 worldwide citation)

A high density plasma chemical vapor deposition apparatus includes a vacuum chamber provided with an inlet and an outlet for a reaction gas; a suscepter positioned within the vacuum chamber to mount a wafer thereon, the suscepter having a wafer chuck at its upper surface to prevent the wafer from mo ...


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Peng Sheng Yeng, Chu Ruey Shi: Chip-type mianderlan antenna with multi-layered substrates. Advanced Antenna Technology, March 21, 2002: TW480773 (8 worldwide citation)

The present invention relates to a kind of chip-type Mianderlan antenna having multi-layered substrate, and contains the followings: two insulating plates; one or more than one substrate, which is installed between two insulating plates; and one set or more than one set of antenna circuit, which is ...


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Chiou Hung Je: Wireless transmission method and device of finance stock real-time chart. Mitake Data, March 21, 2002: TW480891 (7 worldwide citation)

The present invention provides a wireless transmission method and device of finance stock real-time chart, which is characterized in modifying the internal design of the traditional finance quotation terminal to add a hyper text transmission protocol (HTTP) transmission server module and connect to ...


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Pandya Suketu J, Lakshmanan Hariharan: Software, systems and methods for managing a distributed network. Centricity, March 21, 2002: TW480859 (7 worldwide citation)

Software, systems and methods for managing a distributed network environment including a plurality of computers interconnected by a network link, where at least some of the computers include a layered communications protocol stack for providing a data interface between an application program and the ...


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Mallart Raoul, Sinha Atul: Emulation of streaming over the internet in a broadcast application. Koninklijke Philips Electronics, March 21, 2002: TW480857 (7 worldwide citation)

In a broadcast application on a client-server network the streaming is emulated of animation data over the Internet to a large number of clients. The animation is considered a sequence of states. State information is sent to the clients instead of the graphics data itself. The clients generate the a ...