1
David H Tracy, Donald L Smith: Electrode for plasma etching system. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, Francis L Masselle, September 16, 1986: US04612077 (107 worldwide citation)

An electrode includes a plurality of nested concentric rings forming plenum chambers. Process gas is fed into the plenum chambers through capillary tubes. The gas is then delivered through slits between the rings into a plasma etching reactor.


2
Daniel N Galburt: Microlithographic apparatus. Thomas P Murphy, Edwin T Grimes, August 28, 1990: US04952858 (85 worldwide citation)

This invention is directed to electro-magnetic alignment apparatus which includes a monolithic stage, a sub-stage, an isolated reference structure, force actuators interposed between the monolithic stage and the sub-stage for suspending and positioning the monolithic stage in space, sensors for sens ...


3
David H Tracy, Paul G Saviano: Wafer cooling and temperature control for a plasma etching system. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, Francis L Masselle, October 7, 1986: US04615755 (85 worldwide citation)

Pressurized gas is applied between a wafer and electrode in a plasma etching system. Gas between the wafer and electrode provides cooling of the wafer. A control arrangement maintains the gas at a predetermined pressure.


4
David Trost: Electro-magnetic alignment assemblies. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, F L Masselle, March 26, 1985: US04507597 (80 worldwide citation)

This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination a first magnetic circuit having a plurality of elements including a first ...


5
David R Shafer, Abe Offner, Rama Singh: Optical relay system with magnification. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, Francis L Masselle, May 31, 1988: US04747678 (76 worldwide citation)

There is disclosed a ring field relay optical system incorporating concave spherical mirrors and including magnification achieved, at least partially, by a convex spherical mirror. In further modifications, aberrations introduced by the convex mirror are controlled by lens groups formed from fused s ...


6
Christopher P Ausschnitt: Overlay test wafer. The Perkin Elmer Corporation, Thomas P Murphy, E T Grimes, F L Masselle, August 27, 1985: US04538105 (68 worldwide citation)

The present invention is directed to an improved test wafer for testing the overlay alignment of a second level pattern over a first level pattern for testing lithographic equipment used in making microcircuits, which includes four conductors with circuitry provided for each conductor measuring the ...


7
Irwin Friedman: Single mirror projection optical system. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, Francis L Masselle, October 25, 1988: US04779966 (65 worldwide citation)

A well corrected ring field catadioptric optical system utilizing refractive elements of the same glass type. A virtual relay corrected for axial and lateral primary color incorporates an air-surface doublet and two field lenses to correct for field aberrations to provide a well corrected ring field ...


8
David M Williamson: Optical reduction system. Thomas P Murphy, Edwin T Grimes, September 4, 1990: US04953960 (65 worldwide citation)

An unobscured catadioptric optical reduction system wherein all refractive elements are made of the same material. From its long conjugate end to its short conjugate end the system comprises a first lens group, a beamsplitter, a second lens group, a mirror and a third lens group arranged so that rad ...


9
Robert A Gilanyi, Ralph H Schmitt: Peripheral controller for coupling data buses having different protocol and transfer rates. Concurrent Computer Corporation, Edwin T Grimes, Frances L Masselle, Thomas P Murphy, December 29, 1987: US04716525 (62 worldwide citation)

A peripheral controller is provided for controlling data transfers between peripheral devices operably on one type of data bus to devices operable on a second data bus. An intermediate buffer is utilized so that data is read into one memory block from the sending data bus and read out of another mem ...


10
John J Bacich: Precision lens mounting. The Perkin Elmer Corporation, Thomas P Murphy, Edwin T Grimes, Francis L Masselle, March 29, 1988: US04733945 (60 worldwide citation)

A precision lens mounting assembly which includes a plurality of lens cells and a plurality of lenses which correspond to the plurality of lens cells. The lens cells have an annular shape. Flexure means are disposed within the inner diameter of the lens cell which hold the lens in a predetermined sp ...