1
Katherina Babich
Katherina E Babich, Alessandro Cesare Callegari, Julien Fontaine, Alfred Grill, Christopher V Jahnes, Vishnubhai Vitthalbhai Patel: Tunable and removable plasma deposited antireflective coatings. International Business Machines Corporation, Thomas A Beck, Daniel P Morris, August 6, 2002: US06428894 (63 worldwide citation)

Disclosed is vapor deposited BARC and method of preparing tunable and removable antireflective coatings based on amorphous carbon films. These films can be hydrogenated, fluorinated, nitrogenated carbon films. Such films have an index of refraction and an extinction coefficient tunable from about 1. ...


2
Katherina Babich
Marie Angelopoulos, Katherina E Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R Medeiros, Wayne Martin Moreau, Karen E Petrillo, John P Simons: Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof. International Business Machines Corporation, Thomas A Beck, Daniel P Morris, May 4, 2010: US07709177 (5 worldwide citation)

Multilayered resist structures including bilayer and top surface imaging which utilize tuned underlayers functioning as ARCs, planarizing layers, and etch resistant hard masks whose properties such as optical, chemical and physical properties are tailored to give a multilayer resist structure exhibi ...


3
Katherina Babich
Marie Angelopoulos, Katherina E Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R Medeiros, Wayne Martin Moreau, Karen E Petrillo, John P Simons: Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof. International Business Machines Corporation, Thomas A Beck, Daniel P Morris, June 15, 2010: US07736833

Multilayered resist structures including bilayer and top surface imaging which utilize tuned underlayers functioning as ARCs, planarizing layers, and etch resistant hard masks whose properties such as optical, chemical and physical properties are tailored to give a multilayer resist structure exhibi ...


4
Katherina Babich
Marie Angelopoulos, Katherina E Babich, Douglas Charles Latulipe, Qinghuang Lin, David R Medeiros, Wayne Martin Moreau, Karen E Petrillo, John P Simons: Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof. Thomas A Beck, May 29, 2008: US20080124650-A1

Multilayered resist structures including bilayer and top surface imaging which utilize tuned underlayers functioning as ARCs, planarizing layers, and etch resistant hard masks whose properties such as optical, chemical and physical properties are tailored to give a multilayer resist structure exhibi ...


5
Katherina Babich
Marie Angelopoulos, Katherina E Babich, Douglas Charles LaTulipe, Qinghuang Lin, David R Medeiros, Wayne Martin Moreau, Karen E Petrillo, John P Simons: Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof. Thomas A Beck, May 29, 2008: US20080124649-A1

Multilayered resist structures including bilayer and top surface imaging which utilize tuned underlayers functioning as ARCs, planarizing layers, and etch resistant hard masks whose properties such as optical, chemical and physical properties are tailored to give a multilayer resist structure exhibi ...


6
Milan Paunovic, Christopher Jahnes: Production of electroless Co(P) with designed coercivity. International Business Machines Corporation, Thomas A Beck, March 6, 2001: US06197364 (148 worldwide citation)

This invention provides a method and solution for the electroless deposition of Co(P) with a designed coercivity via the programmed addition of supporting electrolytes comprising such sulfur containing compounds as sulfamic acid, potassium sulfate or sodium sulfate to a solution having a source of c ...


7
Russell D Allen, F Read McFeely, Cevdet I Noyan, John J Yurkas: Method for improving the morphology of refractory metal thin films. International Business Machines Corporation, Thomas A Beck, August 22, 2000: US06107199 (131 worldwide citation)

A method of producing a smooth surface for a film of refractory metallic material is realized by placing a substrate in a CVD reactor; initiating deposition of a layer of two phase material via concurrent introduction into the CVD reactor of a precursor gas and molecular oxygen, the latter at a pres ...


8
Christos Dimitrios Dimitrakopoulos, Peter Richard Duncombe, Bruce K Furman, Robert B Laibowitz, Deborah Ann Neumayer, Sampath Purushothaman: Fabrication of thin film effect transistor comprising an organic semiconductor and chemical solution deposited metal oxide gate dielectric. Thomas A Beck, August 31, 1999: US05946551 (129 worldwide citation)

A thin film transistor (TFT) device structure based on an organic semiconductor material, that exhibits a high field effect mobility, high current modulation and a low sub-threshold slope at lower operating voltages than the current state of the art organic TFT devices. A fabrication process for the ...


9
Sih Pin Chang, Ephraim Feig, Thomas Yu Kiu Kwok: Method for accessing and retrieving information from a source maintained by a network server. International Business Machines Corporation, Thomas A Beck, October 17, 2000: US06134584 (99 worldwide citation)

A method and system is disclosed for scheduling data download, such as web pages, databases or softwares, over a network such as the internet. The method includes the steps of (a) initiating the data download request and the user input interfaces; saving the requesting computer system's network addr ...


10
Brian Samuel Beaman, Keith Edward Fogel, Paul Alfred Lauro, Da Yuan Shih: Pluggable chip scale package. International Business Machines, Thomas A Beck, June 20, 2000: US06078500 (92 worldwide citation)

A structure for packaging an electronic device. The package has: an electronic device having a first surface and an opposite second surface, the first surface having a plurality of first electrical contact locations; a substrate having a surface having a plurality of substrate electrical contact loc ...