1
David N Wang, John M White, Kam S Law, Cissy Leung, Salvador P Umotoy, Kenneth S Collins, John A Adamik, Ilya Perlov, Dan Maydan: Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process. Applied Materials, Robert J Stern, Philip A Dalton, March 19, 1991: US05000113 (566 worldwide citation)

A high pressure, high throughput, single wafer, semiconductor processing reactor is disclosed which is capable of thermal CVD, plasma-enhanced CVD, plasma-assisted etchback, plasma self-cleaning, and deposition topography modification by sputtering, either separately or as part of in-situ multiple s ...


2
David N Wang, John M White, Kam S Law, Cissy Leung, Salvador P Umotoy, Kenneth S Collins, John A Adamik, Ilya Perlov, Dan Maydan: Plasma-enhanced CVD process using TEOS for depositing silicon oxide. Applied Materials, Philip A Dalton, Robert J Stern, November 8, 1994: US05362526 (254 worldwide citation)

A high pressure, high throughput, single wafer, semiconductor processing reactor is disclosed which is capable of thermal CVD, plasma-enhanced CVD, plasma-assisted etchback, plasma self-cleaning, and deposition topography modification by sputtering, either separately or as part of in-situ multiple s ...


3
Robert R Rotzoll: Wake up device for a communications system. Ozer M N Teitelbaum, Robert J Stern, August 4, 1998: US05790946 (250 worldwide citation)

A communication system includes a first communication device for receiving data and a wake up signal. Operation of the first communication device includes an active mode of operation and a sleep mode of operation for reducing power consumption. Further, the system includes a switch for switching the ...


4
John R Tuttle: Electrically powered postage stamp or mailing or shipping label operative with radio frequency (RF) communication. Micron Technology, William J Bethurum, Robert J Stern, March 5, 1996: US05497140 (227 worldwide citation)

The present application describes an electronically powered postage stamp or mailing label and including a radio frequency identification (RFID) device and system mounted between the opposing and facing major surfaces thereof. The RFID device and system includes an integrated circuit transceiver chi ...


5
Mark E Tuttle, John R Tuttle: System with chip to chip communication. Micron Technology, Stanley N Protigal, William R Bachand, Robert J Stern, April 15, 1997: US05621913 (200 worldwide citation)

A system for wireless communication between a plurality of semiconductor chips is disclosed. Each data line in the present invention is coupled with a transmitter for transmitting information to any other semiconductor chip. Furthermore, each data line is coupled with a receiver for receiving inform ...


6
John M White, Ernst Keller, Wendell T Blonigan: Flexibly suspended gas distribution manifold for plasma chamber. Applied Materials, Robert J Stern, November 12, 2002: US06477980 (189 worldwide citation)

A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the ...


7
Charles K Snodgrass, David H Allen, John R Tuttle, Robert R Rotzoll, George E Pax: Data communication method using identification protocol. Micron Technology, William R Bachand, Robert J Stern, March 19, 1996: US05500650 (165 worldwide citation)

A protocol is used to coordinate the use of a common communication medium by one or more interrogating commander stations and an unknown plurality of responding responder stations. Each commander station and each responder station is equipped to broadcast messages and to check for error in received ...


8
Mark E Tuttle, John R Tuttle, Rickie C Lake: Method of manufacturing an enclosed transceiver. Micron Communications, William R Bachand, Robert J Stern, July 14, 1998: US05779839 (153 worldwide citation)

The present invention teaches a method of manufacturing a enclosed transceiver, such as a radio frequency identification ("RFID") tag. Structurally, in one embodiment, the tag comprises an integrated circuit (IC) chip, and an RF antenna mounted on a thin film substrate powered by a thin film battery ...


9
John R Tuttle: RF identification system with restricted range. Micron Communications, Robert J Stern, August 1, 2000: US06097301 (150 worldwide citation)

A method of adjusting the 2-way communication range of an RFID system to assist a human operator to individually handle and interrogate a plurality of tagged objects, such as suitcases, that each include an RFID tag transceiver. An RFID interrogator transceiver is mounted on the human operator. The ...


10
Ernst Keller, Quanyuan Shang: Suspended gas distribution manifold for plasma chamber. Applied Materials, Robert J Stern, August 10, 2004: US06772827 (150 worldwide citation)

A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the si ...