1
Earl R Lory, Leonard J Olmer: Anisotropic deposition of silicon dioxide. AT&T Bell Laboratories, R B Anderson, May 7, 1991: US05013691 (205 worldwide citation)

In a radio-frequency plasma deposition reactor (10), SiO.sub.2 is deposited from a source (16) of tetraethoxysilane (TEOS). The deposition is made to be anisotropic, that is, to be deposited preferentially on horizontal surfaces, by use in the deposition atmosphere of a constituency such as NH.sub.3 ...


2
Leonard J Olmer: Silicon dioxide deposition method using a magnetic field and both sputter deposition and plasma-enhanced CVD. AT&T Bell Laboratories, R B Anderson, February 18, 1992: US05089442 (191 worldwide citation)

In plasma enhanced chemical vapor deposition (PECVD) of silicon dioxide on a substrate, voids and discontinuities are reduced by first depositing silicon dioxide in a sputter each chamber (22) in which a magnetic field is produced within the rf plasma for depositing the silicon dioxide. Simultaneous ...


3
Shue Yu Kwan: Remote channel switching for video on demand service. AT&T Bell Laboratories, R B Anderson, April 27, 1993: US05206722 (180 worldwide citation)

VOD services are provided by providing at each subscriber location a switching apparatus (e.g., 23 of FIG. 2) which is remotely controlled from the head end (12) of the system. A set top box of each subscriber is provided with a single channel designation (X) for VOD reception. In response to a requ ...


4
William R Holland, Muhammed A Shahid: Optical fiber interconnection apparatus and method. AT&T Bell Laboratories, R B Anderson, October 13, 1992: US05155785 (99 worldwide citation)

A substantially parallel array of printed wiring boards (11A-E) each support a light source element (13A-E) and a light detector element (14A-E). Each light source element is connected to all of the light detector elements of the other printed wiring boards by optical fibers (18) supported in arcuat ...


5
Nagesh R Basavanhally, Richard Borutta, Theodore Sizer II, James A Walker: Optical fiber alignment method. AT&T Bell Laboratories, R B Anderson, August 4, 1992: US05135590 (60 worldwide citation)

A bundle (12) of optical fibers (13) is fixed in a matrix array by apertures in a guiding plate (14) and a securing plate (15). The apertures (18) in the guiding plate are larger than those in the securing plate and the securing plate apertures (17) are funnel-shaped to aid in insertion of the fiber ...


6
Michael F Brady, John K Dorey II, Aubrey L Helms Jr: Photolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layers. AT&T Bell Laboratories, R B Anderson, November 19, 1991: US05066615 (57 worldwide citation)

An antireflection coating (21) for use in integrated circuit processing consists of a film of x-silicon-nitride, where x is a metal from the group consisting of titanium, vanadium, chromium, zirconium, niobium, molybdenum, hafnium, tantalum and tungsten. These coatings are preferably made by sputter ...


7
David D C Chang, Edward L Smith Jr: Methods for testing integrated circuit devices. AT&T Bell Laboratories, R B Anderson, April 27, 1993: US05206585 (56 worldwide citation)

A method for testing an integrated circuit (IC) chip (10) in accordance with the invention comprises the step of forming a solder bump (14) on each of an array of bonding pads (13) on a first surface of the chip, in accordance with the known flip-chip method of IC device packaging. Each of the solde ...


8
Bryan C Chung, Roland Ellis Jr, Kenneth G Frazee: Semiconductor wafer cleaning method and apparatus. AT&T Bell Laboratories, R B Anderson, March 19, 1991: US05000795 (48 worldwide citation)

A reagent chemical is directed along a first pipe portion (20) that extends along one side of the array of wafers (14) and which contains a plurality of jets (33) for projecting the chemical toward the wafers. A plurality of second pipe portions (21) transmits an inert gas, with each pipe portion ha ...


9
Nagesh R Basavanhally, Richard Borutta, Theodore Sizer II, James A Walker: Optical fiber alignment apparatus including guiding and securing plates. AT&T Bell Laboratories, R B Anderson, February 9, 1993: US05185846 (44 worldwide citation)

A bundle (12) of optical fibers (13) is fixed in a matrix array by apertures in a guiding plate (14) and a securing plate (15). The apertures (18) in the guiding plate are larger than those in the securing plate and the securing plate apertures (17) are funnel-shaped to aid in insertion of the fiber ...


10
David H Ziger: Semiconductor lithography methods using an ARC of organic material. AT&T Bell Laboratories, R B Anderson, June 30, 1992: US05126289 (41 worldwide citation)

An antireflection coating (16) for use with a photolithographic process comprises a layer of organic material that planarizes the surface upon which a photoresist layer (21) is deposited, is highly absorptive of deep ultraviolet actinic light, and can be plasma etched along with an underlying metal ...