1
Alexander I Ershov, William F Marx: Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source. Cymer, Matthew Hillman, William C Cray, March 27, 2007: US07196342 (150 worldwide citation)

Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove ...


2
Robert P Akins, Richard L Sandstrom: Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate. Cymer, Matthew Hillman, January 8, 2008: US07317179 (6 worldwide citation)

Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each ...


3
Palash P Das, Thomas Hofmann, Otto Boucky, Ernst Stump, Berthold Matzkovits, Michael Hoell, Joerg Walther, Kurt Brenner, Guenter Grupp: Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate. Cymer, Carl Zeiss Industrielle Messtechnik, Matthew Hillman, October 2, 2007: US07277188 (1 worldwide citation)

Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determin ...


4
Stuart L Anderson: Control circuit with automatic DC offset. Cymer, Matthew Hillman, May 27, 2008: USRE040343

An automatic gain control circuit in the feedback path for a laser wavelength control circuit is described herein. This gain control circuit automatically adjusts the amplification of the analog signals output from a photodetector array, where the array detects a fringe pattern created by a laser be ...