1
Robert W Paglione: Coaxial applicator for microwave hyperthermia. RCA Corporation, Samuel Cohen, Joseph D Lazar, Robert L Troike, May 27, 1980: US04204549 (190 worldwide citation)

Apparatus for hyperthermia treatment provides transmission of microwave energy for irradiation of tissues and simultaneous and concurrent and continuous measurement of the temperature of the heated tissues at the site of the treatment. The microwave energy is supplied to the site of treated tissue b ...


2
Ernest Jellinek: System for automatic vehicle location. RCA Corporation, H Christoffersen, Joseph D Lazar, John P McMahon, August 15, 1978: US04107689 (138 worldwide citation)

An automatic vehicle location system wherein the position of a mobile unit is at any time (on a "real-time" basis) defined by a stored predetermined location code communicated to the mobile unit from a remote unit at a predetermined location and dead reckoned location coordinates relative to such st ...


3
Herbert H Chapman Jr: Electronic mail box. RCA Corporation, H Christoffersen, Joseph D Lazar, Raymond E Smiley, August 8, 1978: US04106060 (128 worldwide citation)

An electronic mail box includes an entry slot for receiving a letter to be transmitted electronically to a remote point, an optical reader for converting the letter text to electronic signals, and a keyboard for receiving the address of the addressee. The address is checked for consistency. Then the ...


4
Hans P Kleinknecht, William E Ham, Heinrich Meier: Optical measurements of fine line parameters in integrated circuit processes. RCA Corporation, Birgit E Morris, Donald S Cohen, Joseph D Lazar, October 11, 1983: US04408884 (118 worldwide citation)

The image transfer process in integrated circuit (IC) processes such as large scale integrated (LSI) device process manufacturing is monitored by optical measurements on a stage-by-stage basis by measuring a monitor specimen or test sample formed with a diffraction grating of a predetermined pattern ...


5
William B Hall: Megasonic jet cleaner apparatus. RCA Corporation, Birgit E Morris, Donald S Cohen, Joseph D Lazar, April 27, 1982: US04326553 (117 worldwide citation)

An apparatus for cleaning a surface of an article such as a semiconductor wafer with cleaning fluid includes a nozzle extending from a chamber for developing a jet of cleaning fluid. The fluid is pressurized and megasonic energy is applied to the fluid by a megasonic transducer. The nozzle is shaped ...


6
Ludwig Muhlfelder, Robert Benson Hogan: Magnetic torquing system for changing the spin rate of an orbiting satellite. RCA Corporation, H Christoffersen, Joseph D Lazar, Robert M Rodrick, September 19, 1978: US04114841 (105 worldwide citation)

The angular momentum of a tumbling orbiting satellite is changed to reduce the spinning of the spacecraft such that the spacecraft can operate in an essentially stabilized condition. The change in spin rate is accomplished by the development of a magnetic torque by commutation of magnetic air coils ...


7
John G Martin: Susceptor for heating semiconductor substrates. RCA Corporation, Birgit E Morris, Donald S Cohen, Joseph D Lazar, March 30, 1982: US04322592 (83 worldwide citation)

An integral graphite susceptor of the barrel type comprising a hollow polyhedron arranged to support one or more semiconductor substrates on its outer planar wall surfaces. The substrates are supported in a novel column and row array in which each wafer is mounted on a wall surface portion that is r ...


8
Edward C Douglas: Apparatus and method for neutralizing the beam in an ion implanter. RCA Corporation, Birgit E Morris, Donald S Cohen, Joseph D Lazar, November 30, 1982: US04361762 (81 worldwide citation)

An ion implanter apparatus is described with provision for neutralizing the space charge potential of the ionic beam with a closed loop feedback system responding to the electrical charges that tend to accumulate on a target specimen. Neutralization is provided by a controllable electron source surr ...


9
John R Sandercock: Thin film thickness monitor. RCA Corporation, Birgit E Morris, Donald S Cohen, Joseph D Lazar, October 26, 1982: US04355903 (77 worldwide citation)

A thin film thickness monitor uses the successive reflection of polychromatic light from a reference or standard thin film having a varying optical thickness (n.sub.1 t.sub.1) and then from a thin film of unknown thickness (t.sub.f) or optical thickness (n.sub.f t.sub.f). The reflected intensity of ...


10
Stanley Shwartzman: Megasonic cleaning apparatus and method. RCA Corporation, Birgit E Morris, Donald S Cohen, Joseph D Lazar, September 24, 1985: US04543130 (71 worldwide citation)

Cleaning apparatus for cleaning semiconductor wafers and the like in a chamber of cleaning fluid vibrating at ultrasonic (megasonic) frequencies utilizing an electrically energized transducer, such as a piezoelectric crystal, mounted on a conductive foil formed of tantalum or zirconium. Pinholes or ...