1
Nikos Nassuphis: Image-based three-axis positioner for laser direct write microchemical reaction. Revise, Lahive & Cockfield, March 7, 2000: US06033721 (140 worldwide citation)

Apparatus for determining a best trajectory for laser CVD through a strategy of acquiring a series of two-dimensional plane images of the substrate. These images, taken together, contain topographical information as well as local reflectivity and thermal mapping information. The images are combined ...


2
Daniel Ehrlich: Laser-induced etching of multilayer materials. Revise, Thomas J Lahive & Cockfield Engellenner, February 23, 1999: US05874011 (38 worldwide citation)

Techniques and apparatus for the laser induced etching of a reactive material, or of a multilayer substrate or wafer comprising layers of materials of different etching characteristics and reactivities, are disclosed. Short wavelength laser radiation and control of the process ambient equalize etch ...