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NOLLER Bastian, LAUTER Michael, SUGIHARTO Albert Budiman, LI Yuzhuo, RUSHING Kenneth, FRANZ Diana, BÖHN Roland: COMPOSITION DE POLISSAGE CHIMIQUE-MÉCANIQUE (CMP) COMPRENANT DEUX TYPES DINHIBITEURS DE CORROSION, A CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION COMPRISING TWO TYPES OF CORROSION INHIBITORS. BASF SE, NOLLER Bastian, LAUTER Michael, SUGIHARTO Albert Budiman, LI Yuzhuo, RUSHING Kenneth, FRANZ Diana, BÖHN Roland, BASF, September 27, 2012: WO/2012/127399 (3 worldwide citation)

A chemical-mechanical polishing ("CMP") composition (P) comprising (A) inorganic particles, organic particles, or a mixture or composite thereof, (B) at least one type of A/-heterocyclic compound as corrosion inhibitor, (C) at least one type of a further corrosion inhibitor selected from the group c ...


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NOLLER Bastian Marten, LI Yuzhuo, FRANZ Diana, RUSHING Kenneth, LAUTER Michael, SHEN Daniel Kwo Hung, LAN Yongqing, BAO Zhenyu: COMPOSITION DE POLISSAGE CHIMIQUE-MÉCANIQUE (CMP) COMPRENANT UNE POLYAMINE POLYMÈRE, A CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION COMPRISING A POLYMERIC POLYAMINE. BASF SE, NOLLER Bastian Marten, LI Yuzhuo, FRANZ Diana, RUSHING Kenneth, LAUTER Michael, SHEN Daniel Kwo Hung, LAN Yongqing, BAO Zhenyu, BASF, September 27, 2012: WO/2012/127398

A chemical-mechanical polishing (CMP) composition comprising (A) inorganic particles, organic particles, or a composite or mixture thereof, (B) a polymeric polyamine or a salt thereof comprising at least one type of pendant group (Y) which comprises at least one moiety (Z), wherein (Z) is a carboxyl ...


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DRESCHER Bettina, NOLLER Bastian Marten, SCHMITT Christine, SUGIHARTO Albert Budiman, LI Yuzhuo: COMPOSITION DE POLISSAGE CHIMICO-MÉCANIQUE (CMP), CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION. BASF SE, DRESCHER Bettina, NOLLER Bastian Marten, SCHMITT Christine, SUGIHARTO Albert Budiman, LI Yuzhuo, BASF, April 12, 2012: WO/2012/046183

A chemical mechanical polishing (CMP) composition Abstract Use of a chemical mechanical polishing (CMP) composition comprising (A)inorganic particles, organic particles, or a mixture thereof, (B)a heteropolyacid or a salt thereof, (C)a salt comprising chloride, fluoride, bromide, or a mixture thereo ...