1
Joseph J Bendik, Matt Hankinson: Method and apparatus for the production of process sensitive lithographic features. KLA Tencor Corporation, Beyer Weaver & Thomas, January 6, 2004: US06673638 (217 worldwide citation)

A method for controlling the variation in process parameters using test structures sensitized to process parameter changes. Wavefront engineering techniques are used to make features of the test structure more sensitive to process changes. Focus and exposure parameters are adjusted in response to th ...


2
Mehdi Vaez Iravani, Stanley Stokowski, Guoheng Zhao: Sample inspection system. Kla Tencor Corporation, Skjerven Morril MacPherson, March 13, 2001: US06201601 (155 worldwide citation)

A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may ...


3
Matthias C Krantz: Conventional and confocal multi-spot scanning optical microscope. KLA Tencor Corporation, Eric B Meyertons, Conley Rose & Tayon PC, June 19, 2001: US06248988 (150 worldwide citation)

A multispot scanning optical microscope image acquisition system for confocal and conventional imaging, metrology, real-time viewing, inspection and review of an object features an array of multiple separate focused light spots illuminating the object and a corresponding array detector detecting lig ...


4
Amin Samsavar, Thomas McWaid, Sergey Yudin: Acoustic sensor as proximity detector. Kla Tencor Corporation, Majestic Parsons Siebert & Hsue, December 22, 1998: US05852232 (142 worldwide citation)

An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick re ...


5
John R Jordan III, Mehrdad Nikoonahad, Keith B Wells: Surface inspection system. Kla Tencor Corporation, Majestic Parsons Siebert & Hsue, January 26, 1999: US05864394 (137 worldwide citation)

A high throughput surface inspection system with enhanced detection sensitivity is described. The acquired data is processed in real time at a rate of below 50 MHz thereby reducing the cost for data processing. Anomalies are detected and verified by comparing adjacent repeating patterns and the heig ...


6
Brian C Leslie, Mehrdad Nikoonahad, Keith B Wells: Optical scanning system for surface inspection. Kla Tencor Corporation, Majestic Parsons Siebert & Hsue P C, June 27, 2000: US06081325 (134 worldwide citation)

In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from ...


7
Norbert Marxer, Kenneth P Gross, Hubert Altendorfer, George Kren: Process and assembly for non-destructive surface inspections. Kla Tencor Corporation, Skjerven Morrill MacPherson, August 7, 2001: US06271916 (124 worldwide citation)

A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies ...


8
Mehdi Vaez Iravani: Single laser bright field and dark field system for detecting anomalies of a sample. Kla Tencor Corporation, Majestic Parsons Siebert & Hsue, August 25, 1998: US05798829 (124 worldwide citation)

A single laser is used to provide light for both dark and bright field detection. The laser beam is split into two beams by a Wollaston prism and both beams are directed towards a sample to be inspected to illuminate two areas of the sample. The light reflected by or transmitted through the sample a ...


9
Ginetto Addiego: Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illumination. KLA Tencor Corporation, June 29, 1999: US05917588 (113 worldwide citation)

An automated inspection system and method replaces human visual inspection of the surface of a specimen having distinguishing features or anomalies that are detectable under either one or a combination of bright field and dark field illumination. A preferred embodiment is an after develop inspection ...


10
Noah Bareket: Overlay alignment mark design. KLA Tencor Corporation, Beyer Weaver & Thomas, October 8, 2002: US06462818 (101 worldwide citation)

A mark comprising at least one set of calibration periodic structures and at least two sets of test periodic structures, both types of which are positioned along an axis. The mark is used to measure the relative position between two layers of a device. Each set of test periodic structures has its pe ...