1
Erwin Meinders
Meinders Erwin Rinaldo, Peter Maria, Giesen Peter Theodorus Maria, de Laat Wilhelmus Johannes Maria: A system for patterning flexible foils. Nederlandse Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek Tno, Meinders Erwin Rinaldo, Peter Maria, Giesen Peter Theodorus Maria, de Laat Wilhelmus Johannes Maria, HATZMANN MJ, September 3, 2009: WO/2009/108054 (1 worldwide citation)

According to one aspect, the invention provides a table (1) for compensating deformation in flexible foils. The table (1) comprises a supportive base (2) and a deformation compensation system (3). This system comprises a plurality of movable elements (4), supported by the base (2), wherein the movab ...


2
Erwin Meinders
De Laat Wilhelmus Johannes Maria, Gui Cheng Qun, Giesen Peter Theodorus Maria, Van Der Heijden Marcus Theodoor Wilhelmus, Meinders Erwin Rinaldo, Peter Maria: Lithographic apparatus and method. Asml Netherlands, Tno, de Laat Wilhelmus Johannes Maria, Gui Cheng Qun, Giesen Peter Theodorus Maria, Van Der Heijden Marcus Theodoor Wilhelmus, Meinders Erwin Rinaldo, Peter Maria, ROBERTS Peter David, May 14, 2009: WO/2009/060294 (1 worldwide citation)

A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including: directing a beam of radiation at the surface of the flexible substrate; and detecting changes in the intensity distribution of the beam of radiation after the beam of radiation ...