WO/2009/060294 is referenced by 1 patents.

A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including: directing a beam of radiation at the surface of the flexible substrate; and detecting changes in the intensity distribution of the beam of radiation after the beam of radiation has been reflected from the surface of the substrate to obtain information indicative of the topography of the surface of the flexible substrate.

Title
Lithographic apparatus and method
Application Number
PCT/IB2008/002977
Publication Number
2009/060294
Application Date
November 3, 2008
Publication Date
May 14, 2009
Inventor
Peter Maria
Meinders Erwin Rinaldo
Van Der Heijden Marcus Theodoor Wilhelmus
Giesen Peter Theodorus Maria
Gui Cheng Qun
De Laat Wilhelmus Johannes Maria
Agent
ROBERTS Peter David
Assignee
Peter Maria
Meinders Erwin Rinaldo
Van Der Heijden Marcus Theodoor Wilhelmus
Giesen Peter Theodorus Maria
Gui Cheng Qun
de Laat Wilhelmus Johannes Maria
Tno
Asml Netherlands
IPC
G01B 11/30
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