WO/2007/094501 is referenced by 54 patents.

A semiconductor device includes an oxide semiconductor thin film layer (3) primarily including zinc oxide having at least one orientation other than (002) orientation. The zinc oxide may have a mixed orientation including (002) orientation and (101) orientation. Alternatively, the zinc oxide may have a mixed orientation including (100) orientation and (l0l) orientation.

Title
Semiconductor device and manufacturing method thereof
Application Number
PCT/JP2007/053119
Publication Number
2007/094501
Application Date
February 13, 2007
Publication Date
August 23, 2007
Inventor
Hiramatsu Takahiro
Matsuda Tokiyoshi
Furuta Hiroshi
Furuta Mamoru
Hirao Takashi
Agent
KIYOHARA Yoshihiro
Assignee
Hiramatsu Takahiro
Matsuda Tokiyoshi
Furuta Hiroshi
Furuta Mamoru
Hirao Takashi
Casio Computer
Kochi Industrial Promotion Center
IPC
H01L 21/363
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