WO/2007/026294 is referenced by 4 patents.

The present invention relates to a method of manufacturing a stamper for replicating a high density relief structure, the method comprising the steps of: providing a master substrate (10) comprising a substrate layer (12) and a recording stack overlying the substrate layer, the recording stack comprising a mask layer (14) and an interface layer (16) between the mask layer and the substrate layer, and the mask layer comprising a phase transition material, projecting a laser beam onto selected regions (20) of the mask layer, thereby inducing a heat-related phase transition for changing the properties of the selected regions of the mask layer with respect to chemical agents, applying a chemical agent to the mask layer for removing the selected regions of the mask layer, thereby uncovering regions (22) of the interface layer, and plasma etching the recording stack, thereby forming pits (24) in the uncovered regions of the interface layer. The present invention further relates to a stamper and an optical disc.

Title
Method of manufacturing a stamper for replicating a high density relief structure
Application Number
PCT/IB2006/052954
Publication Number
2007/026294
Application Date
August 25, 2006
Publication Date
March 8, 2007
Inventor
Fumichon Julien J X
de Loynes de
Meinders Erwin R
Agent
VAVLKONET Rutger
Assignee
Fumichon Julien J X
de Loynes de
Meinders Erwin R
Moser Baer India
IPC
G11B 07/26
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