WO/2006/109501 is referenced by 4 patents.

(EN) A piezoelectric element inspection method includes: a first inspection signal application step for applying a first inspection signal Vp(1) having a first predetermined piezoelectric waveform to a piezoelectric element; a first characteristic value measuring step for measuring the electric characteristic value of the piezoelectric element after the first inspection signal application as a first characteristic value; a second inspection signal application step for applying a second inspection signal Vp(2) having a second predetermined voltage waveform and having power greater than the first inspection signal to the piezoelectric element; a second characteristic value measuring step for measuring the electric characteristic value of the piezoelectric element after the second inspection signal application as a second characteristic value; and an error judging step for judging whether the piezoelectric element has failed according tot he value based on the difference between the measured second characteristic value and the measured first characteristic value.(JA) この圧電素子の検査方法は、圧電素子に第1所定電圧波形を有する第1検査信号Vp(1)を印加する第1検査信号印加ステップと、第1検査信号印加後における圧電素子の電気的特性値を第1特性値として測定する第1特性値測定ステップと、圧電素子に第2所定電圧波形を有し第1検査信号の電力よりも大きい電力の第2検査信号Vp(2)を印加する第2検査信号印加ステップと、第2検査信号印加後における前記圧電素子の電気的特性値を第2特性値として測定する第2特性値測定ステップと、測定された第2特性値と測定された第1特性値との差に応じた値に基づいて圧電素子が異常であるか否かな判定する異常判定ステップと、を含む。

Title
(Ja) 圧電素子の検査方法、検査装置及び分極処理方法
(En) Piezoelectric element inspection method, inspection device, and polarization processing method
Application Number
PCT/JP2006/305906
Publication Number
2006/109501
Application Date
March 17, 2006
Publication Date
October 19, 2006
Inventor
Nehagi Takatoshi
Yamada Tomohiro
Ohnishi Takao
Agent
PROSPEC PATENT FIRM
Assignee
Nehagi Takatoshi
Yamada Tomohiro
Ohnishi Takao
Ngk Insulators
IPC
H01L 41/22
G01N 27/24
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