WO/2006/088709 is referenced by 1 patents.

A thin film resistor device and method of manufacture includes a layer of a thin film conductor material (20) and a current density enhancing layer (CDEL). The CDEL is an insulator material adapted to adhere to the thin film conductor material (20) and enables the said thin film resistor to carry higher current densities with reduced shift in resistance. In one embodiment, the thin film resistor device includes a single CDEL layer (50) formed on one side (atop or underneath) the thin film conductor material (20). In a second embodiment, two CDEL layers are formed on both sides (atop and underneath) of the thin film conductor material (20). The resistor device may be manufactured as part of both BEOL and FEOL rocesses.

Title
Thin film resistors with current density enhancing layer (cdel)
Application Number
PCT/US2006/004436
Publication Number
2006/088709
Application Date
February 8, 2006
Publication Date
August 24, 2006
Inventor
Eshun Ebenezer E
Chinthakindi Anil K
Agent
JAKLITSCH Lisa U
Assignee
Eshun Ebenezer E
Chinthakindi Anil K
International Business Machines Corporation
IPC
H01C 01/012
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