WO/2006/080516 is referenced by 6 patents.

(EN) Disclosed is an exposure apparatus (EX) comprising a recovery port (22) for recovering a liquid (LQ), a blow port (32) arranged on the outer side of the recovery port (22) with respect to an optical path space (K1) for blowing a gas therethrough, and an exhaust vent (42) arranged between the recovery port (22) and the blow port (32) for discharging at least a part of the gas blown in through the blow port (32). Consequently, the liquid filling the optical path space of exposure light positioned between the projection optical system and the substrate is prevented from leaking out in this exposure apparatus.(JA)  露光装置EXは、液体LQを回収する回収口22と、光路空間K1に対して回収口22の外側に設けられ、気体を吹き出す吹出口32と、回収口22と吹出口32との間に設けられ、吹出口32から吹き出された気体の少なくとも一部を排気する排気口42とを備えている。投影光学系と基板との間の露光光の光路空間に満たされた液体の漏出を防止できる露光装置を提供する。

Title
(Ja) 露光装置及びデバイス製造方法
(En) Exposure apparatus and method for manufacturing device
Application Number
PCT/JP2006/301508
Publication Number
2006/080516
Application Date
January 31, 2006
Publication Date
August 3, 2006
Inventor
Nakano Katsushi
Nagasaka Hiroyuki
Okuyama Takeshi
Kohno Hirotaka
Agent
KAWAKITA Kijuro
Assignee
Nakano Katsushi
Nagasaka Hiroyuki
Okuyama Takeshi
Kohno Hirotaka
Nikon Engineering
Nikon Corporation
IPC
G03F 07/20
H01L 21/027
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