WO/2006/052855 is referenced by 2 patents.

An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.

Title
Fine stage z support apparatus
Application Number
PCT/US2005/040229
Publication Number
2006/052855
Application Date
November 4, 2005
Publication Date
May 18, 2006
Inventor
Arai Yoichi
Watson Douglas C
Hazelton Andrew J
Binnard Michael B
Agent
GARRETT Arthur S
Assignee
Arai Yoichi
Watson Douglas C
Hazelton Andrew J
Binnard Michael B
Nikon Corporation
IPC
G03B 27/58
G03B 27/42
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