WO/2004/090633 is referenced by 530 patents.

An environmental system (26) for controlling an environment in a gap (246) between an optical assembly (16) and a device (30) includes a fluid barrier (254), an immersion fluid system (252), an electro-osmotic element (256), and a control system (255). The fluid barrier (254) is positioned near the device (30) and maintains the electro-osmotic element (256) near the gap (246). The immersion fluid system (252) delivers an immersion fluid (248) that fills the gap (246). The control system (255) applies an electrical voltage to the electro-osmotic element (256) that causes the electro-osmotic element (256) to transport at least a portion of the immersion fluid (248) that is near the fluid barrier (254) and the device (30) away from the device (30). The electro-osmotic element (256) can be made of a porous material.

Title
An electro-osmotic element for an immersion lithography apparatus
Application Number
PCT/IB2004/001376
Publication Number
2004/090633
Application Date
April 4, 2004
Publication Date
October 21, 2004
Inventor
Eaton John K
Agent
ROEDER Steven G
Assignee
Eaton John K
Nikon Corporation
IPC
G03B 27/58
G03B 27/42
G03B 27/32
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