3789471 is referenced by 131 patents and cites 1 patents.

Vacuum devices incorporate electron or field forming sources formed by a cellular array of emission sites. The sources comprise a metal/insulator/metal film sandwich on a substrate with a cellular array of holes through the upper metal and insulator, leaving the edges of the upper metal electrode effectively exposed to the upper surface of the lower metal electrode. Sharp protuberances directed toward the upper electrode and constituting emitter tips of controlled configurations are formed on the exposed area of the lower electrode. A method of forming the structure includes starting with the metal/insulator/metal film sandwich having the cellular array of holes already formed and directing permanent electrode material into the cellular array of holes and masking or subsequently removable material onto the surface surrounding the holes whereby an individual sharp cone-like emitter is formed within each of the holes in the cellular array. Vacuum devices are formed from such structures. For example, a diode is formed either by making the masking material over each emission site an electrode or by removing the masking material and applying a conductive electrode material over each emission site.

Title
Field emission cathode structures, devices utilizing such structures, and methods of producing such structures
Application Number
05/215,068
Publication Number
3789471
Application Date
January 3, 1972
Publication Date
February 5, 1974
Inventor
Heynick Louis N
Shoulders Kenneth R
Spindt Charles A
Agent
Faubion Urban H
Assignee
Stanford Research Institute
IPC
H01j 09/02
H01J 09/02
H01J 01/304
H01J 01/30
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