09943789 cites 142 patents.

The present disclosure relates to modular filtration cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filter housing may define a filter cavity comprising an upstream portion and a downstream portion. The filter may further comprise a filter element disposed in the filter cavity. The filter element may at least partially overlap the filter inlet on a first side of the filter element. The filter element may comprise a rectangular pleated filter with a set of pleats having a first set of pleat tips on an upstream side of the filter element and a second set of pleat tips on a downstream side of the pleated filter.

Title
Modular filter cassette
Application Number
14/349596
Publication Number
9943789 (B2)
Application Date
October 3, 2012
Publication Date
April 17, 2018
Inventor
Marc Laverdiere
Wakefield
MA, US
Ben Mai Pak Lee
Pelham
NH, US
Christopher John Lowe
Merrimack
NH, US
Louis Barrows Jr
Billerica
MA, US
John P Puglia
Townsend
MA, US
Assignee
Entegris
MA, US
IPC
B01D 35/12
B01D 46/52
B01D 35/30
B01D 29/07
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