09904184 is referenced by 1 patents and cites 57 patents.

A liquid immersion member is used in a liquid immersion exposure apparatus, and is capable of forming a liquid immersion space on a surface of an object opposite to an emitting surface of an optical member which emits exposure light. The liquid immersion member includes a first member that includes a first part disposed at surrounding of an optical path of the exposure light, and in which a first opening part, through which the exposure light is able to pass, and a first liquid supply part, which is disposed at at least a portion of surrounding of the first opening part and is capable of opposing the surface of the object, are provided at the first part, and a second member that includes a first liquid recovery part which is capable of opposing the surface of the object and is movable with respect to the first member outside the first part with respect to the optical path.

Title
Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
Application Number
15/486976
Publication Number
9904184 (B2)
Application Date
April 13, 2017
Publication Date
February 27, 2018
Inventor
Shinji Sato
Fukaya
JP
Agent
Oliff
Assignee
NIKON CORPORATION
JP
IPC
G03F 7/20
G03B 27/42
G03B 27/52
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