09823583 is referenced by 1 patents and cites 58 patents.

A liquid immersion member used in a liquid immersion exposure apparatus, and is capable of forming liquid immersion space on a surface of an object opposite to an emitting surface of optical member which emits exposure light. Liquid immersion member includes a first member that includes a first part disposed at surrounding of an optical path of exposure light, and in which a first opening part, through which exposure light is able to pass, and first liquid supply part, which is disposed at at least a portion of surrounding of first opening part and is capable of opposing surface of object, are provided at first part, and a second member that includes a first liquid recovery part which is capable of opposing surface of object and is movable with respect to first member outside first part with respect to optical path.

Title
Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium
Application Number
14/743430
Publication Number
9823583 (B2)
Application Date
June 18, 2015
Publication Date
November 21, 2017
Inventor
Shinji Sato
Fukaya
JP
Agent
Oliff
Assignee
NIKON CORPORATION
JP
IPC
G03F 7/20
G03B 27/52
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