09666449 is referenced by 10 patents and cites 7 patents.

An embodiment of a method of forming a control gate includes forming a conductor having a concentration of germanium that varies with a thickness of the conductor, and removing portions of the conductor at a variable rate that is governed, at least in part, by the concentration of the germanium.

Title
Conductors having a variable concentration of germanium for governing removal rates of the conductor during control gate formation
Application Number
14/291659
Publication Number
9666449 (B2)
Application Date
June 17, 2014
Publication Date
May 30, 2017
Inventor
Randy J Koval
Boise
ID, US
Agent
Dicke Billig & Czaja PLLC
Assignee
Micron Technology
ID, US
IPC
H01L 27/11582
H01L 21/3205
H01L 21/28
H01L 21/3213
H01L 27/11556
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