09651873 is referenced by 1 patents and cites 54 patents.

A liquid immersion member used in an immersion exposure apparatus, and capable of forming a liquid immersion space on a surface of an object opposite to an emitting surface of an optical member which emits exposure light. The liquid immersion member includes a first member that includes a first part disposed at surrounding of an optical path of the exposure light, and in which a first opening part, through which the exposure light is able to pass, and a first liquid supply part, is disposed at at least a portion of surrounding of the first opening part and capable of opposing the surface of the object, are provided at the first part, and a second member includes a first liquid recovery part which can be opposing the surface of the object and is movable with respect to the first member outside the first part with respect to the optical path.

Title
Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium
Application Number
14/134999
Publication Number
9651873 (B2)
Application Date
December 19, 2013
Publication Date
May 16, 2017
Inventor
Shinji Sato
Fukaya
JP
Agent
Oliff
Assignee
NIKON CORPORATION
JP
IPC
G03F 7/20
G03B 27/42
G03B 27/52
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