09610653 cites 201 patents.

The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.

Title
Method and apparatus for separation of workpieces and articles produced thereby
Application Number
14/32829
Publication Number
9610653 (B2)
Application Date
September 20, 2013
Publication Date
April 4, 2017
Inventor
Matthew Pysher
Fremont
CA, US
Jack Rundel
Portland
OR, US
Michael Darwin
Portland
OR, US
Joe Frankel
Beaverton
OR, US
James Brookhyser
Portland
OR, US
Qian Xu
Portland
OR, US
Glenn Simenson
Portland
OR, US
Min Zhang
Fremont
CA, US
Mathew Rekow
Santa Cruz
CA, US
Fang Shan
San Jose
CA, US
Haibin Zhang
Portland
OR, US
Assignee
Electro Scientific
OR, US
IPC
B23K 103/00
B23K 26/364
B23K 26/36
B23K 26/16
B23K 26/00
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