09519210 is referenced by 19 patents and cites 12 patents.

A method for designing, a structure, method of inspecting and a computer system for designing voltage contrast integrated circuit characterization. The design method includes selecting a design level of a mask design shapes file; selecting a region of the design level having an open region having no design shapes and an adjacent circuit region having circuit design shapes; selecting a sub-region of the circuit region adjacent to the open region; copying design shapes of the sub-region to generate a characterization cell identical to the sub-region; modifying the characterization cell to generate a passive voltage contrast characterization cell; and placing the passive voltage contrast characterization cell into the open region adjacent to the sub-region to generate a modified design level.

Title
Voltage contrast characterization structures and methods for within chip process variation characterization
Application Number
14/549719
Publication Number
9519210 (B2)
Application Date
November 21, 2014
Publication Date
December 13, 2016
Inventor
Yongchun Xin
Poughkeepsie
NY, US
Zhigang Song
Hopewell Junction
NY, US
Yunsheng Song
Poughkeepsie
NY, US
Oliver D Patterson
Poughkeepsie
NY, US
Agent
Steven Meyers
Schmeiser Olsen & Watts
Assignee
International Business Machines Corporation
NY, US
IPC
H01L 21/66
H01L 23/522
G03F 1/36
G06F 17/50
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