09507265 is referenced by 2 patents and cites 45 patents.

An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.

Title
Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
Application Number
14/681475
Publication Number
9507265 (B2)
Application Date
April 8, 2015
Publication Date
November 29, 2016
Inventor
Shinji Sato
Fukaya
JP
Agent
Oliff
Assignee
NIKON CORPORATION
JP
IPC
G03F 7/20
G03B 27/58
G03B 27/52
G03B 27/32
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