09468872 cites 104 patents.

The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Title
Purification system with manifold assembly and removable filter cassette
Application Number
14/432741
Publication Number
9468872 (B2)
Application Date
September 30, 2013
Publication Date
October 18, 2016
Inventor
Craig Wallace Martland
Salem
NH, US
J Karl Niermeyer
Tyngsborough
MA, US
Dmitri Menn
Marblehead
MA, US
Kalyan Madhavaram
Lowell
MA, US
Louis Barrows Jr
Billerica
MA, US
Ben Mai Pak Lee
Pelham
NH, US
John P Puglia
Townsend
MA, US
Koichi Kurata
Yonezawa
JP
Hirokazu Kuwabara
Fuchu
JP
Marc Laverdiere
Wakefield
MA, US
Agent
Sprinkle IP Law Group
Assignee
Entegris
MA, US
IPC
B01D 63/14
B01D 65/00
F16L 19/025
F16L 19/00
B25B 17/02
F16L 19/02
B01D 29/52
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