09404587 is referenced by 28 patents and cites 1181 patents.

A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.

Title
Lockout tagout for semiconductor vacuum valve
Application Number
14/260701
Publication Number
9404587 (B2)
Application Date
April 24, 2014
Publication Date
August 2, 2016
Inventor
Ron Moen
Phoenix
AZ, US
John Shugrue
Phoenix
AZ, US
Agent
Snell & Wilmer
Assignee
ASM IP Holding
NL
IPC
F16K 35/06
F16K 3/02
F16K 35/10
F16K 51/02
F16K 35/02
View Original Source