09323160 is referenced by 6 patents and cites 39 patents.

A liquid immersion member forms a liquid immersion space on an object movable below an optical member so that the light path of exposure light emitted from an emission surface of an optical member is filled with liquid. The liquid immersion member includes a first member disposed in at least a portion of the periphery of the optical member, and a second member which is movable at the outside of at least a portion of the first member and which includes a recovery port that recovers at least a portion of the liquid in the liquid immersion space.

Title
Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
Application Number
13/793667
Publication Number
9323160 (B2)
Application Date
March 11, 2013
Publication Date
April 26, 2016
Inventor
Yuichi Shibazaki
Kumagaya
JP
Agent
Oliff
Assignee
NIKON CORPORATION
JP
IPC
G03F 7/20
G03B 27/42
G03B 27/52
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