09322843 is referenced by 3 patents and cites 14 patents.

A “Theta” angle adjustment tool is made of a solid parallelepiped and adjusting screw, that allows the wafer probes to be fastened to the auxiliary equipment under correcting “Theta” angles. The procedure consists of loosening the probe and pressing hard on the tool to force the probe to adjust to the intended slope (“Theta”) and then fastening the probe under pressure against the tool and chuck surface. Following that the marks left when the probe tips touch the wafer are assessed and corrective action is taken regarding “Theta misalignment”.

Method for planarity alignment of wafer probes
Application Number
Publication Number
9322843 (B1)
Application Date
March 19, 2013
Publication Date
April 26, 2016
Christos Tsironis
G01R 31/28
G01R 1/067
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