09299538 is referenced by 55 patents and cites 1103 patents.

A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.

Title
Radial waveguide systems and methods for post-match control of microwaves
Application Number
14/221146
Publication Number
9299538 (B2)
Application Date
March 20, 2014
Publication Date
March 29, 2016
Inventor
Dmitry Lubomirsky
Cupertino
CA, US
Soonam Park
Sunnyvale
CA, US
Satoru Kobayashi
Santa Clara
CA, US
Agent
Kilpatrick Townsend & Stockton
Assignee
Applied Materials
CA, US
IPC
H01J 37/244
H01J 37/32
H01J 7/24
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