09287095 is referenced by 54 patents and cites 1112 patents.

An exemplary semiconductor processing system may include a remote plasma source coupled with a processing chamber having a top plate. An inlet assembly may be used to couple the remote plasma source with the top plate and may include a mounting assembly, which in embodiments may include at least two components. The inlet assembly may further include a precursor distribution assembly defining a plurality of distribution channels fluidly coupled with an injection port.

Title
Semiconductor system assemblies and methods of operation
Application Number
14/108692
Publication Number
9287095 (B2)
Application Date
December 17, 2013
Publication Date
March 15, 2016
Inventor
Yogananda Sarode Vishwanath
Karnataka
IN
Bradley Howard
Pleasanton
CA, US
Srinivas Nemani
Sunnyvale
CA, US
Kartik Ramaswamy
San Jose
CA, US
Andrew Nguyen
San Jose
CA, US
Agent
Kilpatrick Townsend & Stockton
Assignee
Applied Materials
CA, US
IPC
H01L 21/3213
H01L 21/311
H01L 21/3065
H01J 37/32
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