09268231 is referenced by 4 patents and cites 36 patents.

A liquid immersion member forms a liquid immersion space on an object which is movable below an optical member so that an optical path of exposure light emitted from an emitting surface of the optical member is filled with liquid. The liquid immersion member includes a first member that has a first lower surface, a second member that has a second upper surface which faces the first lower surface via a gap and a second lower surface which the object is able to face, and that is movable with respect to the first member, and a recovery part that recovers at least a portion of a liquid from a second space, which is between the second lower surface and the object, at an outside of the second lower surface with respect to the optical path.

Title
Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
Application Number
13/800448
Publication Number
9268231 (B2)
Application Date
March 13, 2013
Publication Date
February 23, 2016
Inventor
Shinji Sato
Fukaya
JP
Agent
Oliff
Assignee
NIKON CORPORATION
JP
IPC
G03F 7/20
G03B 27/42
G03B 27/52
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