09244018 cites 38 patents.

A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a plurality of probes. The fixing member is connected with a corresponding groove. The probes are connected with the fixing member and pass through the corresponding groove. The probe holding structure is combined with a lens adjusting mechanism having a lens to form an optical inspection device for testing electric characteristics of chips.

Title
Probe holding structure and optical inspection device equipped with the same
Application Number
13/940870
Publication Number
9244018 (B2)
Application Date
July 12, 2013
Publication Date
January 26, 2016
Inventor
Yun Ru Huang
Chu-Pei
TW
Keng Shieng Chang
Chu-Pei
TW
Hui Pin Yang
Chu-Pei
TW
Chin Tien Yang
Chu-Pei
TW
Chien Chang Lai
Chu-Pei
TW
Chen Chih Yu
Chu-Pei
TW
Chiu Kuei Chen
Chu-Pei
TW
Chin Yi Tsai
Chu-Pei
TW
Chia Tai Chang
Chu-Pei
TW
Agent
Muncy Geissler Olds & Lowe P C
Assignee
MPI Corporation
TW
IPC
G01R 1/067
G01R 1/073
H01L 21/68
G01R 1/06
G01R 1/04
G01N 21/88
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