09234797 is referenced by 1 patents and cites 24 patents.

A focal plane array (FPA) imaging sensor includes an array of multiple tuning cells disposed on a monolithic substrate, in which each tuning cell includes: (a) a tunable etalon disposed in the monolithic substrate, and (b) a THz detector assembly comprised of at least two antennae disposed in the monolithic substrate. The THz detector assembly is disposed below the tunable etalon. Each tunable etalon includes a Fabry-PĂ©rot interferometer comprised of upper and lower mirrors, spaced by a gap between the mirrors, the gap forming an etalon of the interferometer. The FPA imaging sensor may also be formed as a hybrid, in which portions of the tuning cells are fabricated separately from the THz detector assembly and aligned to each other. The lower mirrors may also be fabricated monolithically with the substrate and the upper mirrors may be formed separately and then aligned to the lower mirrors.

Title
Compact THz imaging detector with an integrated micro-spectrometer spectral tuning matrix
Application Number
13/785435
Publication Number
9234797 (B1)
Application Date
March 5, 2013
Publication Date
January 12, 2016
Inventor
Andrew Paul Sacco
Pittsford
NY, US
Paul Poo Kam Lee
Pittsford
NY, US
Jeffrey Daniel Newman
Pittsford
NY, US
Agent
RatnerPrestia
Assignee
Exelis
VA, US
IPC
G01J 3/28
G01J 5/02
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