09216899 is referenced by 1 patents and cites 35 patents.

A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

Title
System and method for miniaturization of synthetic jets
Application Number
13/862616
Publication Number
9216899 (B2)
Application Date
April 15, 2013
Publication Date
December 22, 2015
Inventor
Stanton Earl Weaver
Northville
NY, US
Mehmet Arik
Uskudar Istanbul
TR
Agent
Jean K Testa
Ziolkowski Patent Solutions Group SC
Assignee
General Electric Company
NY, US
IPC
H01L 41/09
B81C 1/00
H01L 23/467
B81B 7/00
F04B 45/047
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